IGGCAS OpenIR  > 油气资源研究院重点实验室
Design of a high precision digital interface circuit for capacitive MEMS accelerometers with floating point
Li, Zongwei1; Xiong, Xingyin1; Liu, Xiong2; Han, Kedu1; Cong, Ning1; Yang, Changchun1
2017-09-01
Source PublicationINTEGRATION-THE VLSI JOURNAL
ISSN0167-9260
Volume59Pages:247-254
SubtypeArticle
AbstractTraditional analog blocks such as integrators are widely used in high precision MEMS accelerometers. However there is few cost-effective method to address the problem of analog integrators' output saturation due to the integrators' input offsets. A high precision digital capacitive MEMS accelerometer interface based on the traditional capacitive MEMS accelerometer sigma-delta interface is proposed to address this issue. An instantaneous floating point analog-to-digital converter (IFP ADC) is proposed to convert the analog frond end amplifier (AFE) output signal to digital signal. The IFP ADC is very effective to digitalize the signal of the proposed interface circuit output, which is similar to Gaussian distribution. A Matlab simulation model is developed to evaluate the theory model. The implementation of digital loop filter realized in a FPGA board can overcome integrator offset issue. In addition, it is much easier to optimize a digital loop filter's parameter and reduce the chip cost. In this work, the AFE and voltage reference etc. are successfully fabricated by using the 0.18 pm mixed-signal CMOS process. The sensitivity and the noise floor of the AFE are respectively 0.71 V/pF and 3.16 mu V/rt(Hz) in an open loop measurement. The evaluation PCB experimental result shows that the noise floor of the system is -135dBg/rt(Hz).
KeywordMicro-electro-mechanical systems (MEMS) Interface circuit Sigma-delta Analog-to-digital converter (ADC)
WOS HeadingsScience & Technology ; Technology
DOI10.1016/j.vlsi.2017.05.008
Funding OrganizationNational Major Scientific Research Instruments and Equipment Development Project(ZDY2012-1-06-04) ; National Science and Technology major Project(2011ZX05008-005) ; National Major Scientific Research Instruments and Equipment Development Project(ZDY2012-1-06-04) ; National Science and Technology major Project(2011ZX05008-005) ; National Major Scientific Research Instruments and Equipment Development Project(ZDY2012-1-06-04) ; National Science and Technology major Project(2011ZX05008-005) ; National Major Scientific Research Instruments and Equipment Development Project(ZDY2012-1-06-04) ; National Science and Technology major Project(2011ZX05008-005)
Indexed BySCI
Language英语
Funding OrganizationNational Major Scientific Research Instruments and Equipment Development Project(ZDY2012-1-06-04) ; National Science and Technology major Project(2011ZX05008-005) ; National Major Scientific Research Instruments and Equipment Development Project(ZDY2012-1-06-04) ; National Science and Technology major Project(2011ZX05008-005) ; National Major Scientific Research Instruments and Equipment Development Project(ZDY2012-1-06-04) ; National Science and Technology major Project(2011ZX05008-005) ; National Major Scientific Research Instruments and Equipment Development Project(ZDY2012-1-06-04) ; National Science and Technology major Project(2011ZX05008-005)
WOS Research AreaComputer Science ; Engineering
WOS SubjectComputer Science, Hardware & Architecture ; Engineering, Electrical & Electronic
WOS IDWOS:000411419800025
PublisherELSEVIER SCIENCE BV
Citation statistics
Cited Times:1[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.iggcas.ac.cn/handle/132A11/61973
Collection油气资源研究院重点实验室
Corresponding AuthorLi, Zongwei
Affiliation1.Chinese Acad Sci, Inst Geol & Geophys, Key Lab Petr Resources Res, Beijing 100029, Peoples R China
2.Univ Calif Los Angeles, Elect Engn Dept, Los Angeles, CA 90024 USA
Recommended Citation
GB/T 7714
Li, Zongwei,Xiong, Xingyin,Liu, Xiong,et al. Design of a high precision digital interface circuit for capacitive MEMS accelerometers with floating point[J]. INTEGRATION-THE VLSI JOURNAL,2017,59:247-254.
APA Li, Zongwei,Xiong, Xingyin,Liu, Xiong,Han, Kedu,Cong, Ning,&Yang, Changchun.(2017).Design of a high precision digital interface circuit for capacitive MEMS accelerometers with floating point.INTEGRATION-THE VLSI JOURNAL,59,247-254.
MLA Li, Zongwei,et al."Design of a high precision digital interface circuit for capacitive MEMS accelerometers with floating point".INTEGRATION-THE VLSI JOURNAL 59(2017):247-254.
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